Accomplished, scientist/engineer with fifteen years' experience in both academic and industrial R&D environments in fields of optics, electrical and materials science. Background includes optical systems design/development, applications and algorithm development for optical metrology tools (wafer & Mask) in the areas of thin-films, defect inspection and printability. Published more than twenty scientific papers and holding two patents.
A. Goonesekera, U. Buttgereit, T. Thaler, E. Graitzer, “A Study of Closed Loop Application: WLCD-CDC for 32nm and beyond reticles”, Proc. of SPIE Vol. 8166, 816619 (2011)
Bo Mu, A. Dayal, A. Goonesekera, P. Lim, C. Chen, P. Liu, K. Yeung, B. Pinto, B. Broadbent, G. Inderhees, “TeraScanXR: a high sensitivity and throughput photomask inspection system”, Proceedings of the SPIE, Volume 7379, id. 72723O (2009)
A. Goonesekera, I. Lee, Bo Mu and A. Dayal, “Thin-Line De-sense capability for database mode inspections with KLA-Tencor TeraScanHR”, Proc. SPIE 7028, Photomask and Next-Generation Lithography Mask Technology XV, 70282J (19 May 2008)
A. Goonesekera, H. Schmalfuss, I. Lee, C. Guan, A. Dayal, T. Schulmeyer, J. Heumann, “Results of new CD detection capability on advanced reticles”, Proc. SPIE 7028, Photomask and Next-Generation Lithography Mask Technology XV, 70282L (19 May 2008)
E. Gallagher, K. Badger M. Lawliss, Y. Kodera, J. Tirapu Azpiroz, S. Pang, H. Zhang, E. Eugenieva, C. Clifford, A. Goonesekera, Y. Tian, “Wafer plane inspection evaluated for photomask production”, Proc. SPIE 7122, Photomask Technology 2008, 71221B (17 October 2008) – BACUS best paper award
A. Goonesekera, D. Wright and W. E. Moerner, "Image amplification and novelty filtering with photorefractive polymers", Appl. Phys. Lett. 76, 3358 (2000). - A featuring article appeared in Laser Focus World: World News, August 2000 issue (p.17)
A. Goonesekera and S. Ducharme, "Effect of dipolar molecules on carrier mobility in a Photorefractive Polymers," J. Appl. Phys. 85, 6506 (1999). A. Goonesekera, S. Ducharme, and J. M. Takacs, "Low-Field Mobility in a Photorefractive Polymer," J. Chem. Phys. 107, 8709 (1997).
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